Method for producing a marking device and apparatus for carrying out said method

ABSTRACT

The invention relates to a method for producing a marking device ( 1 ), according to which a coding coating is applied to the surface of a support ( 2 ). The coding coating comprises at least one magnetic base layer ( 3 ), at least one magnetic coding layer ( 5 ) and a non-magnetic intermediate layer ( 4 ) placed therebetween. Said intermediate layer is composed in such a way that areas of non-parallel or anti-parallel magnetic coupling occur. The invention is characterized in that zones on the surface of the support ( 2 ) are roughened, before the coding coating is applied. The invention also relates to apparatus for carrying out said method.

[0001] The invention relates to a method of producing a marking devicein which a coding coating is provided on the surface of a carrier withat least one magnetic base layer and at least one magnetic coding layeras well as at least one regionally applied nonmagnetic intermediatelayer between the two, which regionally has such characteristics thatzones of nonparallel or antiparallel coupling are produced. Theinvention relates further to an apparatus for carrying out this method.

[0002] In DE 198 52 268 A1=WO 00/30029, a marking device for theapplication of a coding layer to objects like credit cards, admissioncards or the like is disclosed in which, upon the carrier —this can forexample be a foil or also a rigid substrate—a coding layer is appliedwhich in the simplest case is comprised of three layers, namely, amagnetic base layer applied to the carrier, a nonmagnetic intermediatelayer applied to the base layer, for example with the aid of vapordeposition, and a further magnetic coding layer applied to theintermediate layer. As materials for the base layer and the codinglayer, Fe, Co or Ni and their alloys with other elements, especiallyrare earths or their oxides, come into consideration and for theintermediate layer, for example, Cu, Cr, Ru or Rh. In order to utilizethe magnetic intermediate layer coupling effect which is known per se,the intermediate layer has originally such a thickness that anonparallel, preferably an antiparallel coupling is established while inthe remaining regions, the base layer and the coding layer couple inparallel. As a result, the intermediate layer is limited to the regionsof the nonparallel coupling or antiparallel coupling so that anespecially clear magnetic structuring of the coding will result.

[0003] The aforedescribed marking device has the advantage of a highlycharacteristic magnetic marking property which deviates from the usualmagnetic marking with the application of external magnetic fields,especially in that the nonparallel coupling or antiparallel coupling iseliminated under the influence of a saturating magnetic field, theoriginal magnetization state is again restored after the removal of theexternal magnetic field. The coding is thus not extinguished by theexternally-applied magnetic field. In addition, the system can utilizethe effect that weakened or even lost magnetic coding, resulting fromprolonged storage, for example, can be reactivated in that it canobviate the effect of a saturation magnetic field.

[0004] The invention has as its object to provide a method and anapparatus for producing marking devices of the aforedescribed type.

[0005] This object is achieved according to the invention in that thesurface of the carrier, prior to applying the coding coating, is formedwith the zones of different roughness. The invention is based upon theobservation that the roughness of the carrier substantially influencesthe development of the layers thereon and thus also the boundary layers[interfaces] of the intermediate layer. By corresponding adjustment ofthe roughness distribution, the boundary layers of the intermediatelayer are so modified that regions arise in which a nonparallel orantiparallel coupling of the base layer and coding layer are producedand regions in which this coupling does not occur. The desired coding isachieved in the sense of the teaching according to DE 198 52 368.

[0006] In the simplest embodiment of the method of the invention, thesurface of the carrier, at least in one zone, has a first roughness andat least one zone is provided which has a second roughness. This doesnot exclude the possibility that zones with more than two roughnesseswill be provided in order to make the coding more complex.

[0007] The method according to the invention permits the application ofthe intermediate layer uniformly and over the entire area of the baselayer. It allows, however, also for the possibility that theintermediate layer will be applied only regionally and also nonuniformlyto the extent that the method is used in accordance with the inventionfor provided regions of nonparallel or antiparallel coupling on the onehand and regions of parallel coupling on the other.

[0008] The generation of different roughnesses can be effected invarious ways. Thus the surface carrier can be smooth and/or roughened bymeans of surface treatment, for example, by etching, ablation,sputtering by means of ion bombardment, etc. In the latter case, the ionbombardment can be effected with the aid of a focused ion beam locally.Alternatively thereto, it is also possible to effect the ion bombardmentas a surface treatment and to generated in the region of the carrier anonhomogeneous electrical charge field which blocks the ions regionallyso that the ions only reach the carrier where no blocking electriccharge is provided or where an attractive electric charge is provided.

[0009] This can be achieved by electrically charging the carrier itselfnonhomogeneously. An electrically chargeable substrate can, however,also be nonhomogeneously electrically charged and the carrier load uponthis substrate whereby an ion bombardment can be effected on thecarrier. Advantageously a carrier foil is drawn off from a supply and ismoved continuously with an advancing charging foil and the carrier foilsubjected to ion bombardment. Subsequently the carrier foil is separatedfrom the charging foil. The carrier foil can also be withdrawn fromsupply and then charged and after ion bombardment, can be taken up in astore. Alternatively thereto, it can be provided that the charging foilis circulated through an ion bombardment station and dischargeddownstream of the ion bombardment station or can have the electriccharge thereon homogenized.

[0010] Alternatively or in combination therewith is the possibility ofregionally coating the surface of the carrier or regionally providing itwith coatings of different roughnesses. This can be effected by means ofprinting, lithography or vapor deposition, for example, sputtering.

[0011] To the extent that zones with different roughnesses are producedby coating, a method according to the invention can provide that acarrier foil and a masking foil are advanced together and withdrawnrespectively from supplies thereof and that the coating is effected fromthe masking foil side and the masking foil subsequently separated fromthe carrier foil when they can be provided with the base layer. Themasking foil can be formed with openings already before it isincorporated for supply. Alternatively, however, it is possible to formthe masking foil with openings first after its withdrawal from thesupply and before it is brought together with the carrier foil, theseopenings being formed, for example, with the aid of a laser. Theaforedescribed method utilizing a masking foil can also be used for theion bombardment with a surface ion bombardment being applied through theopenings in the masking foil to predetermined zones of the carrier asdelimited by the openings.

[0012] Since the layers can be formed relatively thin so that thedescribed magnetic effects can arise, it has been found to beadvantageous to utilize vapor deposition technology to form the layers,i.e. thermal vapor deposition, sputtering or the like. It isadvantageous in this connection, when the application of the base layerand the coding layer is carried out under the effect of a magnetic fieldin order to thereby produce an anisotropy in the individual layers andensure a suitable magnetization above all in the regions in which nocoupling is to be effected. A suitable protective layer can then beprovided on the coding layer, the protected layer being formed, forexample, from SiC or DLC (diamond-like carbon) this layer being alsoapplied by vapor deposition.

[0013] The aforedescribed process can be carried out with an apparatuswhich is characterized by:

[0014] a) a supply store for a carrier foil;

[0015] b) a supply store for a masking foil;

[0016] c) a surface treatment station for treating the carrier foil;

[0017] d) a take-up store for receiving the masking foil;

[0018] e) a take-up store for receiving the carrier foil;

[0019] f) guide elements and a drive for displacing the carrier foilfrom the supply store through the surface-treatment station to thetake-up store and for displacing the carrier foil and masking foiltogether upstream of the surface-treatment station and for separatingthe carrier foil and masking foil upstream of their take-up store.

[0020] With the aid of this apparatus, a correspondingly treated carrierfoil can be produced which can then be removed from this apparatus andsupplied to an apparatus for the application of the base layer, theintermediate layer and the coding layer whereby in the latter apparatus,corresponding coating stations are provided. It can then be advantageousto carry out the surface treatment of the carrier foil and its coatingin a single apparatus in that the described apparatus would then becompleted with the following apparatus parts:

[0021] a) a first coating station for applying a base layer ofmagnetizable material to the carrier foil;

[0022] b) a second coating station for applying an intermediate layer ofnonmagnetizable material to the base layer;

[0023] c) a third coating station for applying a coating layer ofmagnetizable material onto the intermediate layer;

[0024] d) a take-up store for receiving the marking device;

[0025] e) guide elements and a drive for displacing the carrier foilfrom the supply store through the surface treatment station and thecoating station to the take-up store as well as for feeding together thecarrier foil and masking foil upstream of the surface-treatment stationand for separating the carrier foil and masking foil upstream of thefirst coating station.

[0026] The coating station can be equipped with devices for producing asufficiently strong magnetic field that an anisotropy and thus a stablemagnetization is ensured above all in those regions in which no couplingarises. The devices can be so formed that directly above the carrierfoil between the coating station and carrier foil and at the location atwhich the material meets the carrier foil, a magnetic field ofsufficient magnitude to effect anisotropy is produced.

[0027] Such an apparatus enables a rapid and economical production ofthe marking device whereby the carrier foil can, in addition, dependingupon the respective application, be labeled appropriately. In thisconnection, the surface-treatment station and the coating station canalso be combined into a station with multiple treatment and/or coatingunits. In addition, it is possible to provide the surface-treatmentstation from a plurality of treatment units disposed one after the otherand each treatment unit with a supply store for a masking foil and areceiving store for the take-up of the masking foil.

[0028] To the extent that the masking foil initially has no openingsbetween the supply store in the masking foil and the joining of themasking foil with the carrier foil, a mask-formation station can bearranged for producing openings in the masking foil, the mask-formationstation preferably having a laser-burning unit. In this case, a controldevice should be provided for varying the position of the laser-burningdevice.

[0029] The surface-treatment station can comprise at least one coatingunit, for example in the form of a vapor-deposition unit or a printingunit. Instead of the latter, a device for etching the surface of thecarrier foil can be considered.

[0030] The surface treatment station also be configured as an ionbombardment station for ion beam treatment of the carrier foil sinceeven with an ion bombardment, the roughness of the surface can beinfluenced. In the ion bombardment station, two alternatives can beconsidered. In one case, the station can generate a focused ion beam anda control device can be provided for a targeted control of the ion beam.However, such focussed ion beams can be avoided, i.e. the ionbombardment can be effected as a surface bombardment when anelectrically-chargeable carrier foil is displaced through the ionbombardment station and on which a nonhomogeneous electric charge hasbeen provided by a charging device.

[0031] A corresponding situation can also be achieved when anelectrically-chargeable charging foil is fed through the ion bombardmentstation which has been provided with a nonhomogeneous electric chargeand the feed unit effects a joining of the carrier foil and chargingfoil upstream of the ion bombardment station. Because of the patternedelectrical charge, the ion beam is blocked where the electric chargecorresponds to the charge on the ions so that the ion beam only impingesin those regions of the carrier foil where the carrier foil is free fromelectric charge, or is provided with an opposing electric charge. Incarrying out the aforedescribed proposal, a supply store for thecharging foil can be provided upstream of the ion bombardment stationand a take-up store downstream of the ion bombardment as well as acharging device for applying a patterned electric charge between thesupply store and the ion bombardment station. Alternatively thereto itis however also possible to form a charging foil so that it is endlessand via the feed device is passed together with the carrier foil throughthe ion bombardment station whereby a charging device is providedupstream in the travel direction of the bombardment station and aquenching device for quenching the charge or homogenizing. The charge isprovided between the ion bombardment station and the charging station.In this embodiment, the charging foil following passage through the ionbombardment station is continuously discharged or provided with ahomogeneous charge, then patterned anew with each patterning beingindividually determined.

[0032] The charging foil can be fed over a plurality of reroutingrollers. It is however also possible to tension the charging foil on asupport roller which is juxtaposed with the ion bombardment station andover whose roller periphery the carrier foil is guided past the ionbombardment station whereby the roller periphery is chargeableselectively with the electric charge and charging device for applying apatterned electric charge is provided which is the same as the charge onthe ion beam, together with a quenching device for homogenizing theelectric charge or for discharging the quenching device and the chargingdevice can follow one another in the direction of rotation of thesupport roller in the region of the roller periphery which is free fromthe carrier foil.

[0033] According to a further feature of the invention, a furthercoating station can be provided for applying a protective layer on thecoding layer. The coating station has advantageously vapor depositionunits since with them very thin layers can be produced. For vapordeposition, thermal vapor deposition or sputtering come intoconsideration.

[0034] A supply store or the supply stores and the take-up store ortake-up stores are preferably configured as supply rolls or storagerolls. In the coating station and the surface treatment station, carrierrollers can be arranged over those peripheries the carrier foil is fedso that an effective action by the surface treatment station ispossible.

[0035] The above-mentioned objects are also attained in a method whichis characterized in that, in the application of the intermediate layer,at least one mask is used to cover the regions where no intermediatelayer formations should be effected.

[0036] This can be achieved, for example, by providing a single mask forbuilding up an intermediate layer in the only regions in which anonparallel or antiparallel coupling is to be produced so that theremaining regions remain free from the intermediate layer. There is,however, also the possibility that two layers can be applied to thecarrier and thus one stratum of the intermediate layer without the maskand then at least one further stratum of the intermediate layerregionally utilizing a mask, whereby the two steps can also be carriedout a multiplicity of times. In this connection it can also be providedthat a first stratum of the intermediate layer can be applied regionallywith the use of a first mask and then a second stratum of theintermediate layer applied regionally using a second mask which coversthe first stratum, whereby the stratum have different thicknesses. It isalways important that in operating with this type of structure, theintermediate layer regions provide nonparallel or antiparallel couplingin certain zones and zones with parallel coupling.

[0037] To enable the marking device to be produced in a continuousprocess, the invention provides that a carrier foil and a masking foilare continuously withdrawn from respective supplies and afterapplications of the base layer are brought together and then theapplication of the intermediate layer is applied from the side of themasking foil and the masking foil again directed away from the carrierfoil and the latter next provided with the coding layer. The maskingfoil is provided with openings which can be formed before or afterwithdrawal of the masking layer from its supply and at the latest,however, before the masking foil is brought together with the carrierfoil. The intermediate layer can, as also can the base layer and codinglayer, be built up by the vapor deposition technique, especially bymeans of thermal vapor deposition or sputtering. Here as well aprotective layer can be provided on the coding layer, especially byvapor deposition.

[0038] A device for carrying out the aforedescribed method can have aconfiguration similar to the device which is used for the zone-widecoating of the carrier foil. Deviating from this device, the maskingfoil is here fed through the second coating station so that theintermediate layer is built up on the base layer only in the regionsleft exposed by the masking foil. In this connection, the second coatingstation can have a plurality of coating devices disposed one afteranother and each coating unit can have a supply store for masking foiland take-up store for receiving the masking foil.

[0039] Between the supply store for the masking foil and the junction ofthe masking foil and carrier foil, a mask-forming station can bearranged to produce the openings in the masking foil to the extent themasking foil has not previously been provided with openings. Themask-forming station can have a laser-burning device as well as acontrol unit for varying the position of the laser-burning device.

[0040] The objects are also achieved in a method in which theintermediate layer is applied on a wide surface basis and then at leasta partial layer of the intermediate layer is regionally removed. In thismethod it is possible to apply the intermediate layer initially with auniform thickness, which thickness is so dimensioned that afterapplication of the coding layer a nonparallel or antiparallel couplingis achieved. By local removal of the intermediate layer, regions areformed which, after application of the coding layer, nonparallel orantiparallel coupling and separately parallel coupling can be obtainedso that the desired signature (coding) results. The layer build up can,however, also be so effected that the thicknesses have such dimensionsthat after applications of the coding layer, a parallel coupling isachieved and only in those regions which have been subjected to localablation does a nonparallel or antiparallel coupling arise.

[0041] The ablation can be effected, for example, by means of chemicaletching, whereby the regions which are not to be etched are covered withthe aid of lithographic techniques. Instead, an ion sputtering etching,or ion etching can also be carried out which has been found to beespecially suitable for a continuous process utilizing a carrier foil.

[0042] The last-mentioned method can be carried out by means of anapparatus which is similar to the aforedescribed apparatus with whichthe carrier foil is regionally roughened by ion bombardment, adifference with respect to this apparatus is that the ion bombardmentstation is here arranged between the second and third coating stationsto regionally remove the intermediate layer. The restriction of the ionbombardment to individual regions can be effected by the same means asdescribed above, for example, utilizing the effect of a focused ion beamor by limiting the effect of a surface ion bombardment, for example,with the aid of a mask, also in the form of a foil, or by the action ofa nonhomogeneous electrical charge in the carrier.

[0043] The latter can be produced by means of an electrically-chargeablecarrier foil or with the previously described charging foil which can bebrought together with the carrier foil in the region of the ionbombardment station and supplies a corresponding nonhomogeneous electricfield which regionally blocks the ion beam, so that it is not affectedfor the ablation of the intermediate layer in these regions.

[0044] The objects can also be achieved with a method in which theintermediate layer is applied galvanically, i.e. from a coating materialin the form of a solution containing metal ions and the application iscontrolled with respect to location of thickness by a nonhomogeneouselectric field. This can be obtained in that the metal ions for theintermediate layer can be blocked regionally by the electric field andregionally drawn to the coating, in such form that regions of thesurface to have the intermediate coating will have positive charge andother regions will have negative electrical charge. There where thecharge is negative, the positively-charged metal ions will regionallydeposit to form the intermediate layer while the positively-chargedmetal ion will be blocked in the regions of positive charge.

[0045] The aforedescribed process is particularly effective for theproduction of coding coatings. It is, however, also possible to produceregions with different magnetic coupling only after the formation of thecoding coating. Such process is characterized in that the coding coatingis locally heated to such temperature that the magnetic coupling will bealtered and especially a nonparallel or antiparallel coupling will betransformed into a parallel coupling. In this case the intermediatelayer is locally distorted with the effect that in those regions atwhich the heating is effected, a parallel coupling arises.

[0046] The aforedescribed method allows, during the fabrication of thecoding coating, the production of a uniformly thick intermediate layerwhich effects a nonparallel or antiparallel coupling. It is suitableespecially for continuous coating processes. The local heating isproduced preferably by means of a laser.

[0047] The aforedescribed method can be carried out especiallyeconomically by means of an apparatus which is characterized by:

[0048] a) a supply store for a carrier foil;

[0049] b) a heating station for locally heating the coding coating;

[0050] c) a take-up store for receiving the marking device;

[0051] d) guide elements and a drive for feeding the carrier foil fromthe supply store through the heating station to the take-up store.

[0052] With the aid of this apparatus, a base layer, intermediate layerand coding layer on a carrier foil can be locally heated. It isadvantageous when the build up of the layers and the local heating iscarried out in a single apparatus, in which case, the aforedescribedapparatus is completed with the following apparatus parts:

[0053] a) a first coating station for applying a base layer of magneticmaterial to the carrier foil;

[0054] b) a second coating station for applying an intermediate layer ofnonmagnetic material to the base layer;

[0055] c) a third coating station for applying a coding layer ofmagnetic material to the intermediate layer:

[0056] d) guide elements and a drive for feeding the carrier foil fromthe supply store through the coating station and through the heatingstation to the take-up store.

[0057] The apparatus has similarities to the aforedescribed apparatusexcept that a heating station is arranged downstream of the thirdcoating station. To the extent that the heating station is a locallyheating laser, a masking of the coding coating can be avoided.

[0058] A variation in the magnetic coupling can be achieved, forexample, also by means of local ion bombardment. This form of thefabrication of a signature by means of regions of nonparallel couplingor antiparallel coupling on the one hand and parallel coupling on theother is also suitable for continuous production processes of theaforedescribed type. To the extent that the apparatus is involved, theapparatus last described need only have a heating station replaced by anion bombardment station which is formed in the same manner as in theaforedescribed apparatus where ion bombardment at other locations iseffected.

[0059] The aforedescribed method and apparatus for producing markingdevices according to the invention permit combinations with one anotheras well. The method and apparatus will then be somewhat more expensive.With the aid of such combined methods and apparatuses, however, stillmore complex coding can be produced which with random generators canensure that such coding will be of a singular nature and itsreproduction thus practically impossible.

[0060] The invention is illustrated in greater detail in the drawingbased upon embodiments. It shows:

[0061]FIG. 1 a cross section through a marking device with illustrationof the magnetization structure;

[0062]FIG. 2 a cross section through the marking device according toFIG. 1 with the magnetization in the saturation range;

[0063]FIG. 3 a graph from which the dependence of antiparallel couplingstrength upon the layer thickness of the intermediate layer isdemonstrated;

[0064]FIG. 4 a device for applying the intermediate layer by the maskingtechnique and

[0065]FIG. 5 a device for applying an intermediate layer and forregional ablation by means of ion bombardment.

[0066] The marking device 1 shown in FIGS. 1 and 2 comprises a carrierlayer 2, for example of Si/SiO₂. It can have an optional thicknesssuitable for the respective purpose. On the carrier layer 3, apermanently magnetic base layer 3 is applied, for example, of cobalt ina thickness of 40 nm. An intermediate layer 4 is applied selectively tothis base layer 3, i.e. regionally, and can be comprised of copper in athickness of 0.8 nm. On the regions without the intermediate layer andwith the intermediate layer 4, a coding layer 5 is applied, for exampleof Co in a thickness of about 25 nm and can be coated on its uppersurface with a protective layer 6, for example, of 50 nm thick Cu layeror a polymeric protective lacquer like, for example, 10 μm PMMA.

[0067] The arrows show the directions and strengths of themagnetizations of the base layer 3 and coating layer 5, 0quantitatively. The direction of the magnetization, however, is rotatedby 90° however for convenience of illustration. With the here describedmaterial combination Co/Cu/Co—as also with most other materialcombinations which come into consideration—the directions ofmagnetization lie in the planes of the base layers 3 10 and coatinglayer 5 and thus are partly parallel and partly antiparallel.

[0068] From FIG. 1 it is to be noted that the base layer 3 is magnetizeduniformly over its area. The coating layer 5 is also magnetized when thesaturation magnetization because of the small 15 thicknesses, is lessthan that in the base layer 3. In the regions in which no intermediatelayer is provided, the magnetization in the coding layer 5 is, paralleland unidirectional [with that of the base layer 3]. Where theintermediate layer 4 is provided, an antiparallel coupling of themagnetization is effective, i.e. the magnetization of the base layer 3and the coding layer 5 are oppositely directed and thus antiparallel.Above the marking device there is shown in a box the strength of theresultant magnetic field by arrows and over [this box] the correspondingsignal which can be read [from the marking device] in the form of agraph. It is to be noted that the magnetization of the base layer 3 inthe regions in which no intermediate layer 4 is provided is reinforcedby the coding layer 5. There, where an intermediate layer 4 is applied,is however a weakening of the resultant magnetic field of the overalllayer arrangement as a consequence of the antiparallel coupling. As aconsequence, a coding structure arises with different resultant fieldstrengths at the surface and which can be detected by suitable sensorsand analyzed.

[0069]FIG. 2 shows the state of the marking device in an externalmagnetic field in the saturation range. It is to be noted that theantiparallel coupling is destroyed so that now even the regions of thecoding layer 5 which are separated by an intermediate layer 4 from thebase layer 3, as well as the neighboring regions without separation byan intermediate layer, have parallel and commonly-directedmagnetizations. Thus all regions are uniformly magnetized, i.e.variations of the magnetic signals disappears. A coding is no longer ineffect. Upon removal of the external magnetic field and thus restorationof the remanence state, however, spontaneously that restores thecondition and visible from FIG. 1, a parallel and antiparallel coupling.As a result, the marking device 1 can be differentiated from othermarking devices which can be produced with conventional magnetizationtechniques, and in which the coding can be extinguished by theapplication of an external magnetic field.

[0070] In the graph according to FIG. 3, the thickness of theintermediate layer 4 is given along the abscissa and theantiferromagnetic coupling strength along the ordinate, and indeed, forthe example in which the base layer 3 and coating layer 5 are comprisedof cobalt and each has a thickness of 40 nm. It is to be noted that thethickness of the antiferromagnetic coupling varies with the thickness ofthe intermediate layer. The highest coupling strength is reached byabout 0.8 nm. Between the extremes there are regions in which noantiparallel coupling arises but a coupling of less than 180°, e.g.about 90°, until there is a parallel ferromagnetic coupling. Even thenregions can be used in that a desired magnetization structure andtherefore coded structure with high complexity can be obtained so thatthen not only—as in the example according to FIG. 1, two differentoverall magnetizations prevail but a plurality or multiplicity ofdifferent magnetizations.

[0071] A marking device with the layer structure according to FIGS. 1and 2 can be produced with the aid of an apparatus 11 which —althoughnot illustrated here in further detail—is arranged in a housingmaintained under high vacuum. The apparatus 11 has three vaporizationstations 12, 13, 14 with each vaporization station 12, 13, 14 having asupport roll 15, 16, 17 which in its lower regions which are flanked byrerouting rolls 18, 19 or 20, 21 or 22, 23. Above the first and secondsupport rolls 15, 16 are respective vaporization devices 24,25. Thethird support roll 17 has two vaporization devices 26, 27 juxtaposedtherewith.

[0072] Ahead of the first vaporization station 12 there is a supply roll28 on which a carrier foil 29 has been rolled up. Between the first andsecond vaporization stations 12 and 13, a further supply roll 30 isarranged on which a masking foil 31 is rolled up. The supply roll 30 hasjuxtaposed therewith a laser device 33 with the aid of which opening,for example designated at 34—can be burned into the masking foil 31.

[0073] During the coating the carrier foil 29 is withdrawn from itssupply roll 28 and runs around the first rerouting roll 18 and isentrained by the support roll 15. It travels, therefore, through thefirst coating station 12 where a base layer 32 is vapor depositedthereon. Then the carrier foil passes under the rerouting roll 19 andjoins with the masking foil 32 upstream of the rerouting roll 20. Bothare entrained by the support roll 16 whereby the masking foil 31 lies onthe carrier foil 29 from the outer side. Previously in the masking foil31, with the aid of laser device 33, a pattern of openings—for exampledesigned at 34 —are burned. By corresponding control of the laser beamgenerated by the laser device 33—there can also be a plurality of laserbeams—, for example with the aid of a random generator, a pattern whichcontinuously changes can be produces the material for intermediate layer35 by sputtering it onto the foil. Because of the partial covering bythe masking foil 31, the material of the base layer 32 can only bereached in regions of the openings 34 in the masking foil 31 so that theintermediate layer 35 is only formed there.

[0074] After passing over the rerouting roller 21, the masking foil 31is led upwardly away from the carrier foil 29 and rolled up in a storageroll 36. The carrier foil 29 has on its upper side not here shown ingreater detail—a pattern of the base layer 30 and intermediate layer 35corresponding to the openings 34 in the masking foil 31.

[0075] The carrier foil 29 runs horizontally to the next rerouting roll22 and then passes around the support roll 17. With the aid of the twovapor deposition devices 26, 27, base layer 30 and intermediate layer 35are provided with a coding layer 37 of ferromagnetic material and aprotective layer 38, for example, of diamond-like carbon or siliconcarbide. In the regions in which no intermediate layer 35 is provided,the base layer 30 and coding layer 37 couple in parallel. There whereintermediate layer 35 is provided, the coupling is antiparallel becausethe intermediate layer 35 in the vaporization station 13 has receivedsuch thickness that it establishes the antiparallel coupling.

[0076] Then the carrier foil 29, provided with the coding coating ofbase layer 30, intermediate layer 35, outer layer 37 and protectivelayer 38, is looped around the rerouting roller 23 and wound up on thestorage roll 39. It can then be packaged corresponding to its respectiveuse.

[0077]FIG. 5 shows a further apparatus 41 for producing a marking deviceaccording to FIGS. 1 and 2. This device as well is enclosed in a highvacuum housing. It comprises in sequence in the direction of travel afirst vapor deposition station 42, an ion bombardment station 43 andsecond vapor deposition station 44. The stations 42, 43, 44 have supportrolls 45, 46, 47 which are flanked in lower regions respectively bypairs of rerouting rollers 48, 49 or 50, 51 or 52, 53.

[0078] The first vapor deposition station 42 has two evaporating unitsabove the support roll 45. The second vapor deposition station 44 alsohas two vapor deposition devices 56, 57 arranged next to one another inthe upper part. In the ion bombardment station 43, above the supportroll 46 an ion charging device 58 is provided. Below the support roll 46and between the associated rerouting rollers 50, 51 is acharge-distributing device 59 provided on the left side with which thesupport roll 46 can be provided with regions of positive electricalcharge and/or reasons of negative electrical charge. This can beachieved, for example, in accordance with the principles of a laserprinter by initially applying a homogeneous charge which is removed inzones by local exposure to light of the surface of the support roll 46.At the right-hand side from the charge-distributing device 59, aquenching device 60 is arranged which results in complete discharge ofthe surface of the support roll 46 or leaves the latter with ahomogeneous electric charge.

[0079] On a supply roll 61, a carrier foil 42 is wound up. In operation,the carrier foil 62 is drawn off the supply roll 61 and passes aroundthe first rerouting roller 48 onto the periphery of the first supportroll 45 with which it is entrained. It then travels to the firstvaporization unit and there has a wide area coating sputtered onto it asa base layer 63. By means of the second vapor deposition device 55, anintermediate layer 54 of nonmagnetic material is sputtered onto the fullsurface of the base layer 63. The thus equipped carrier foil 62 passesaround subsequent rerouting rollers 49 and 50 and travels then onto theperiphery of the second support roll 46 and loops around the latter. Itthus passes the ion bombardment device 58 which causes ions to impingeon the intermediate layer 54 over the entire area thereof. Because ofthe charge distribution on the surface of the support roll 46 which hasbeen generated previously by the charge distribution device 59, thesurface of the intermediate layer 64 has regions which block the ionimpingement and/or draw the ions to it. For those regions withattractive potential, the intermediate layer 64 is ablated so that onlyparts of the intermediate layer 64 remain. The support roll 46 ishomogeneous upon continuing rotation before it reaches the quenchingdevice 60 and is thus either completely discharged or provided with ahomogeneous charge so that the charging unit 59 can again charge thesupport roll 46 with a new distribution pattern.

[0080] After passing around the rerouting rollers 51, 52 the carrierfoil 62 passes into the second vapor deposition station 44 in which itagain is fed over the periphery of the support roll 47. There thepattern of base layer 63 and intermediate layer 64 is provided with acoding layer 65 with the aid of the vapor deposition unit 56, the codinglayer consisting of ferromagnetic material, and then with a protectivelayer 66 by means of the further vapor deposition unit 57. In theregions without the intermediate layer, parallel coupling between thebase layer 63 and coding layer 65 is established while there, where anintermediate layer 64 is provided, antiparallel coupling arises, sincethe intermediate layer 64 was applied in the first vapor depositionstation 42 in such thickness that such coupling would result.

[0081] After passing through the second vaporization station 44, thecarrier foil 61 provided with the coding coating is wound up in astorage roll 47 after passing the last rerouting roller 53. It can thenbe separated into single sheets.

1. A method of producing a marking device (1) in which the surface of acarrier (2) has coding coating applied thereto with at least onemagnetic base layer (3) and at least a magnetic coding layer (5) as wellas with a nonmagnetic intermediate layer (4) arranged between the two,which has such properties that regions of nonparallel or antiparallelcoupling are provided, characterized in that the surface of the carrier(2) before applying the coding coating, is formed with zones ofdifferent roughness.
 2. The method according to claim 1, characterizedin that the surface of the carrier (2) has at least one region which hasa first roughness and at least one region which has a second roughness.3. The method according to claim 1 or 2, characterized in that theintermediate layer (4) is uniformly applied.
 4. The method according toclaim 1 or 2, characterized in that the intermediate layer (4) isapplied over the entire area of the base layer (3).
 5. The methodaccording to claim 1 to 4, characterized in that the surface of thecarrier (2) is coated using the lithographic technique regionally. 6.The method according to claim 1 to 4, characterized in that the surfaceof the carrier (2) is regionally smooth and/or roughened by means ofsurface treatment.
 7. The method according to claim 6, characterized inthat the surface of the carrier (2) is regionally roughened y means ofetching and/or ion bombardment.
 8. The method according to claim 7,characterized in that the ion bombardment is effected with the aid of afocused laser beam.
 9. The method according to claim 7, characterized inthat the ion bombardment is effected arealy and a nonhomogeneouselectric charge field is established in the region of the carrier (2).10. The method according to claim 9, characterized in that anelectrically chargeable carrier is nonhomogeneously electrically chargedprior to the ion bombardment.
 11. The method according to claim 9,characterized in that an electrically chargeable substrate isnonhomogeneously electrically charged and the carrier is led on to thissubstrate and the ion bombardment is effected on the carrier.
 12. Themethod according to claim 11, characterized in that a carrier foil iswithdrawn from a supply and brought together with a continuously movingcharging foil and the carrier foil is treated with ion bombardment. 13.The method according to claim 12, characterized in that the carrier foiland charging foil are separated after the ionic bombardment.
 14. Themethod according to claim 12 or 13, characterized in that the chargingfoil is withdrawn from a supply and then charged and is afterward takenup in a store.
 15. The method according to claim 12 or 13, characterizedin that the charging foil is fed in a circulation through the ionbombardment station and the charging foil is charged upstream of the ionbombardment station and is discharged downstream of the ion bombardmentstation or the electric charge is homogenized.
 16. The method accordingto claim 1 to 4, characterized in that the surface of the carrier (2) isregionally coated or regionally provided with different roughnesscoatings.
 17. The method according to claim 16i characterized in thatthe surface of the carrier (2) is printed.
 18. The method according toclaim 16, characterized in that the surface of the carrier (2) isregionally coated by vapor deposition.
 19. The method according to claim6 or to one of claims 16 to 18, characterized in that a carrier foil anda masking foil are continuously withdrawn from respective stores and arebrought together and that then the application of the coating or the ionbombardment is effected from the side of the masking foil and themasking foil is again separated form the carrier foil and the latter isthen provided with the base layer.
 20. The method according to claim 19,characterized in that the masking foil after withdrawal from the supplyand before being brought together with the carrier foil is formed withopenings.
 21. The method according to one of claims 1 to 20,characterized in that the base layer (3), the intermediate layer (4) andthe coding layer (5) are vapor deposited.
 22. The method according toone of claims 1 to 21, characterized in that the application of the baselayer (3) and of the coding layer (5) is carried out under the effect ofa magnetic field.
 23. The method according to one of claims 1 to 22,characterized in that a protective layer is applied, especially by vapordeposition to the coding layer.
 24. An apparatus for carrying out themethod according to one of claims 1 to 23 characterized by: a) a supplystore for a carrier foil; b) a supply store for a masking foil; c) asurface treatment station for the treatment of the carrier foil; d) atake-up store for the receipt of the making foil; e) a take-up store forthe receipt of the carrier foil. [sic] f) feed devices and a drive forfeeding the carrier foil from the supply store through the surfacetreatment station to the take-up store as well as for joining togetherthe carrier foil and masking foil upstream of their take-up stores. 25.The apparatus according to claim 24, characterized by a) a first coatingstation for applying a base layer of magnetizable material to thecarrier foil; b) a second coating station for applying an intermediatelayer of nonmagnetizable material on the base layer; c) a third coatingstation for applying a coating layer of magnetizable material on theintermediate layer; d) a take-up store for receiving the marking device;e) feed devices and a drive for feeding the carrier foil from the supplystore through the treatment station and the coating stations to thetake-up store and also for joining the carrier foil and masking foilupstream of the surface treatment station and for separating the carrierfoil and masking foil upstream of the first coating station.
 26. Theapparatus according to claim 24 or 25, characterized in that the surfacetreatment station has a plurality of treatment devices disposed onebehind the other and each treatment device has a supply store for amasking foil and a take-up store for receiving the masking foil.
 27. Theapparatus according to one of claims 24 to 26, characterized in thatbetween the supply store for the masking foil and the joining of themasking foil and carrier foil a mask-forming station is arranged forforming openings in the masking foil.
 28. The apparatus according toclaim 27, characterized in that the mask-forming station has alaser-burning device.
 29. The apparatus according to claim 28,characterized in that the mask-forming station has a control device forvariable position control of the laser-burning device.
 30. The apparatusaccording to one of claims 24 to 29, characterized in that thesurface-treatment station has at least one coating device.
 31. Theapparatus according to claim 30, characterized in that the coatingdevice is configured as a vapor-deposition device.
 32. The apparatusaccording to claim 31, characterized in that the coating device isformed as a printing unit.
 33. The apparatus according to claims 22 to29, characterized in that the surface-treatment station has a unit foretching the surface of the carrier foil.
 34. The apparatus according toclaims 24 to 32, characterized in that the surface-treatment station isconfigured as an ion-bombardment station.
 35. The apparatus for carryingout the method according to claim 7, characterized by: a) a supply storefor a carrier foil; b) an ion-bombardment station for the ion beamimpacting of the carrier foil; c) a take-up store for the carrier foil;d) guide elements and a drive for feeding the carrier foil from thesupply store through the ion-bombardment station to the take-up store.36. The apparatus according to claim 35, characterized by: a) a firstcoating station for applying a base layer of magnetizable material tothe carrier foil; b) a second coating station for applying anintermediate layer of nonmagnetizable material to the base layer; c) athird coating station for applying a coding layer of magnetizablematerial to the intermediate layer; d) a take-up store for the markingdevice; e) guide elements and a drive for feeding the carrier foil fromthe supply store through the ion bombardment station and the coatingstations to the take-up store.
 37. The apparatus according to claim 35or 36, characterized in that the ion-bombardment station generates afocused ion beam and is provided with a control device for the targetedcontrol of the ion beam.
 38. The apparatus according to claim 35 or 36,characterized in that the ion-bombardment station has anelectrically-chargeable carrier foil guided through it and which isprovided with a nonhomogeneous electric charge by a charging device. 39.The apparatus according to claim 35 or 36, characterized in that anelectrically-chargeable charging foil is fed through the ion-bombardmentstation and has been provided with a nonhomogeneous electric charge by acharging device and that the feed elements effect a bringing together ofthe carrier foil and the charging foil upstream of the ion-bombardmentstation.
 40. The apparatus according to claim 39, characterized in thata supply store is provided for the charging foil upstream of theion-bombardment station and a take-up store is provided downstream ofthe ion-bombardment station and a charging device for the nonhomogeneouscharging of the charging foil is provided between the supply store andthe ion-bombardment station.
 41. The apparatus according to claim 39,characterized in that the charging foil is configured as endless and bythe feed elements is fed together with the carrier foil through theion-bombardment station, and that the charge device is provided upstreamof the ion-bombardment station in the travel direction of the carrierfoil, and a quenching device is provided between the ion-bombardmentstation and the charging device for discharging or homogenizing theelectric charge.
 42. The apparatus according to claim 39, characterizedin that the charging foil is stretched on a support roll which isjuxtaposed with the ion-bombardment station.
 43. The apparatus accordingto claim 35 or 36, characterized in that the ion-bombardment station isjuxtaposed with a support roll over the roll periphery of which thecarrier foil is passed through the ion-bombardment station, and that theroll periphery is chargeable with an electric charge, whereby a chargingdevice is provided for charging the roll periphery which charge is thesame as the charge of the ion beam, and a quenching device is providedfor discharging or homogenizing the roll periphery.
 44. The apparatusaccording to claim 43, characterized in that the roll periphery has acoating chargeable with electric charge.
 45. The apparatus according toone of claims 24 to 44, characterized in that the quenching device andthe charging device are provided after one another in the direction ofrotation of the support roll in the region of the roll periphery whichis free from the carrier foil.
 46. The apparatus according to one ofclaims 25 to 45, characterized in that a further coating station isprovided for applying a protective layer to the coding layer.
 47. Theapparatus according to one of claims 25 to 46, characterized in that thecoating stations have vapor deposition devices.
 48. The apparatusaccording to one of claims 24 to 47, characterized in that the supplystore or the supply stores and the take-up store or the take-up storesare configured as supply rolls or storage rolls.
 49. The apparatusaccording to one of claims 25 to 48, characterized in that thesurface-treatment station or the ion-embardment station as well as thecoating station have carrier rollers over whose roll periphery thecarrier foil is guided.
 50. A method of producing a marking device inwhich, upon the surface of a carrier (29) a coding coating with at leastone magnetic base layer (30) and at least one magnetic coding layer (37)as well as an intermediate layer (35) disposed therebetween, is applied,which has such a characteristic that it provides regions of nonparallelor antiparallel coupling, characterized in that in the application ofthe intermediate layer (35) at least one mask (32) is used for coveringthe regions at which no intermediate layer formation is to be effected.51. The method according to claim 50, characterized in that a singlemask (32) is used to build up the intermediate layer (35) only in theregions in which a nonparallel or antiparallel coupling is to beproduced.
 52. The method according to claim 51, characterized in that onthe carrier two layers are applied including a layer without a mask anda layer which is applied regionally with the use of a mask.
 53. Themethod according to claim 50, characterized in that to build up theintermediate layer a first layer is applied regionally with the use of afirst mask and then a second layer is applied regionally with the use ofa second mask which covers the first layer, whereby the thickness of oneof the two layers is such that there no nonparallel or antiparallelcoupling arises.
 54. The method according to one of claims 50 to 53,characterized in that a carrier foil (30) and at least one masking foil(32) are drawn continuously from respective supplies (28, 31) and afterapplication of the base layer (30) are brought together and then afterapplication of the intermediate layer (35) from the side of the maskingfoil (32) and the masking foil or foils (32) are then again separatedfrom the carrier foil (29) and the latter then provided with the codinglayer (37).
 55. The method according to claim 54, characterized in thatthe masking foil (32) after withdrawal from the supply (31) and beforebeing brought together with the carrier foil (20) is. provided withopenings (34).
 56. The method according to one of claims 50 to 55,characterized in that the base layer (30), the intermediate layer (35)and the coding layer (37) are applied by means of vapor deposition. 57.The method according to one of claims 50 to 56, characterized in thatthe application of the base layer (30) and the coding layer (37) areeffected under the influence of a magnetic field.
 58. The methodaccording to one of claims 50 to 57, characterized in that a protectivelayer is applied to the coding layer, especially by vapor deposition.59. An apparatus for carrying out the method according to one of claims50 to 58, characterized by: a) a supply store (29) for a carrier foil(29); b) a first coating station (12) for applying a base layer (32) ofmagnetic material; c) a supply store (30) for a masking foil (31); d) asecond coating station (13) for applying an intermediate layer (35) ofnonmagnetic material to the base layer (32) in the regions left freefrom the masking foil (31); e) a take-up store (36) for receiving themasking foil (31); f) a third coating station (14) for applying a codinglayer (37) of magnetic material to the pattern of the base layer (32)and the intermediate layer (35); g) a take-up store (39) for receiving amarking device; h) feed elements (15 to 23) and a drive for feeding thecarrier foil (29) from the supply store (28) through the coatingstations (12, 13, 14) to the take-up store (39) and for feeding thecarrier foil (29) and the masking foil or foils (31) together betweenthe first and second coating stations (12, 13) and for separating thecarrier foil (29) and the masking foil (31) between second and thirdcoating stations (13, 14).
 60. The apparatus according to claim 59,characterized in that the second coating station has a plurality ofcoating devices arranged one after the other and each coating device isassociated with a supply store for a masking foil and a take-up storefor receiving the masking foil.
 61. The apparatus according to claim 59or 60, characterized in that between supply store (30) for the maskingfoil (31) and the joining of the masking foil (31) and the carrier foil(29), a mask-forming station (33) is located for forming openings (34)in the masking foil (31).
 62. The apparatus according to claim 61,characterized in that the mask-forming station has a laser-burningstation (33).
 63. The apparatus according to claim 62, characterized inthat the mask-forming station (33) has a control device for varying theposition of the laser-burning device.
 64. The apparatus according toclaims 59 to 63, characterized in that a further coating station (27) isprovided for applying a protective layer (38) to the intermediate layer(35).
 65. The apparatus according to one of claims 59 to 64,characterized in that the coating stations (12, 13, 14) havevapor-deposition units.
 66. The apparatus according to one of claims 59to 65, characterized in that the supply store and the take-up store areconfigured as supply rolls (28, 31) or storage rolls (36, 39).
 67. Theapparatus according to one of claims 59 to 66, characterized in that thecoating stations (12, 13) have support rolls (15, 16, 17) over whoseroll peripheries the carrier foil (29) is guided.
 68. A method of makinga marking device in which a coding coating with at least one magneticbase layer (63) and at least one magnetic coding layer (65) as well as anonmagnetic intermediate layer (64) between them is applied to thesurface of a carrier (62) and which has such a characteristic that ithas regions of nonparallel or antiparallel coupling, characterized inthat the intermediate layer (64) is initially applied over the entirearea and then at least a part of the intermediate layer (64) isregionally removed.
 69. The method according to claims 68, characterizedin that the intermediate layer (64) is applied with a uniform thickness.70. The method according to claim 68 or 69, characterized in that theremoval is effected by etching.
 71. The method according to one ofclaims 68 to 70, characterized in that for the removal a lithographicprocess is used.
 72. The method according to claim 68 or 69,characterized in that the removal is effected by means of ionbombardment.
 73. The method according to claim 72, characterized in thatthe ion bombardment is effected with the aid of a focused ion beam. 74.The method according to claim 72, characterized in that the ionbombardment is effected over the entire area and in the region of thecarrier (62) a nonhomogeneous electrical charge field is generated. 75.The method according to claim 74, characterized in that anelectrically-chargeable carrier is charged electrically nonhomogeneouslyprior to the ion bombardment.
 76. The method according to claim 74,characterized in that an electrically-chargeable substrate (46) isnonhomogeneously charged and that the carrier (62) is laid upon thissubstrate (46) and the ion bombardment (58) is effected on the carrier(62).
 77. The method according to claim 76, characterized in that acarrier foil is withdrawn from a supply and is fed together with acontinuously-moving charging foil as substrate and both are subjected toion bombardment.
 78. The method according to claim 77, characterized inthat the carrier foil and the charging foil are separated downstream ofthe ion bombardment.
 79. The method according to claim 77 or 78,characterized in that the carrier foil is drawn from a supply, is thenelectrically charged and after the ion bombardment is taken up in astore.
 80. The method according to claim 77 or 78, characterized in thatthe charging foil is displaced in a circulating path through an ionbombardment station and that the charging foil upstream of theion-bombardment station is electrically charged and downstream of theion bombardment station is discharged or has its electric chargehomogenized.
 81. The method according to claim 73 or 74, characterizedin that a carrier foil and a masking foil are continuously drawn fromrespective supplies and brought together and that then the ionbombardment is effected from the side of the masking foil and themasking foil, again separated from the carrier foil, is again separatedfrom the carrier foil and the latter is then provided with the codinglayer.
 82. The method according to claim 81, characterized in that themasking foil, upon withdrawal from the supply and before being broughttogether with the carrier foil, is provided with openings.
 83. Themethod according to one of claims 68 to 82, characterized in that thebase layer (63) the intermediate layer (64) and the coding layer (65)are vapor deposited.
 84. The method according to one of claims 68 to 83,characterized in that the application of the base layer (63) and of thecoding layer (65) are effected under the influence of a magnetic field.85. The method according to one of claims 68 to 84, characterized inthat the coding layer (65) has a protective layer (66) applied thereto,especially by vapor deposition.
 86. An apparatus for carrying out themethod according to one of claims 68 to 85, characterized by: a) asupply store (60) for a carrier foil (61); b) a first coating station(54) for applying a base layer (63) of magnetic material; c) a secondcoating station (5) [sic] for applying an intermediate layer (64) ofnonmagnetic material to the base layer (63); d) an ion bombardmentstation (43) for the regional ion bombardment of the intermediate layer(64); e) a third coating station (44) for applying a coding layer (65)of magnetizable material to the combination of intermediate layer (64)and the base layer (63Y; f) a take-up store (67) for the marking device;g) guide elements (45 to 53) and a drive for feeding the carrier foil(62) from the supply store (61) through the first and second coatingstations (54, 55), the ion-bombardment station (43) and the thirdcoating station (44) to the take-up store (67).
 87. The apparatusaccording to claim 86, characterized in that the ion-bombardment stationgenerates a focused ion beam and a control device is provided for thetargeted control of the ion beam.
 88. The apparatus according to claim86 or 87, characterized in that the ion-bombardment station has anelectrically-chargeable carrier foil fed therethrough and which isprovided with a nonhomogeneous electric charge by a charging device. 89.The apparatus according to claim 86 or 87, characterized in that theion-bombardment station has an electrically-chargeable charging foilpassed therethrough and provided with a nonhomogeneous electric chargeand that the feed elements effect a joining of the carrier foil andcharging foil upstream of the ion-bombardment-station.
 90. The apparatusaccording to claim 89, characterized in that a supply store is providedfor the charging foil upstream of the ion-bombardment station and atake-up store is provided downstream of the ion-bombardment station anda charging device for the nonhomogeneous charging of the charging foilis provided between the supply store and the ion-bombardment station.91. The apparatus according to claim 89, characterized in that thecharging foil is formed as an endless member and is guided via the guideelements together with the carrier foil through the ion-bombardmentstation and that a charging device in the travel direction of thecarrier foil is provided upstream of the ion-bombardment station and aquenching device for discharging the electric charge or homogenizing theelectric charge is provided downstream of the ion-bombardment station.92. The apparatus according to claim 91, characterized in that thecharging foil is spanned on a support roller which s juxtaposed with theion-bombardment station.
 93. The apparatus according to claim 86 or 87,characterized in that the ion-bombardment station is juxtaposed with asupport roll over whose roll periphery the carrier foil (61) isdisplaced past the ion-bombardment station (43) and that the rollperiphery is chargeable with an electric charge whereby the chargingdevice (59) is provided to charge the roll periphery and which is thesame charge as the charge of the ion beam, and a quenching device (60)is provided to discharge the roll periphery or homogenize the rollperiphery.
 94. The apparatus according to claim 93, characterized inthat the quenching device (59) and a writing device (58) follow oneanother in the rotation direction of the support roll (59) and arearranged in the region of the roll periphery which is free from thecarrier foil (61).
 95. The apparatus according to claim 93 or 94,characterized in that the roll periphery has a coating chargeable withan electric charge.1
 96. The apparatus according to claim 86 or 87,characterized in that a masking foil is passed through theion-bombardment station and that the guide elements effect a joining ofthe carrier foil and masking foil upstream of the ion-bombardmentstation in such manner that the ion bombardment is effected from theside of the masking foil, and that the guide elements separate thecarrier foil and the masking foil after the ion-bombardment station. 97.The apparatus according to claim 96, characterized in that between asupply store for the masking foil and the joining of the masking foiland the carrier foil, a mask-forming station is arranged to produceopenings in the masking foil.
 98. The apparatus according to claim 97,characterized in that the mask-forming station has a laser-burning unit.99. The apparatus according to claim 98, characterized in that themask-forming station has a control device for varying the position ofthe laser-burning device.
 100. The apparatus according to one of claims86 to 99, characterized in that a further coating station (57) isprovided for applying a protective layer (66) to the coding layer (65).101. The apparatus according to one of claims 86 to 100, characterizedin that the coating stations (42, 44) have vapor-deposition devices (54,55).
 102. The apparatus according to one of claims 86 to 101,characterized in that the supply store is configured as a supply roll(60) and the take-up store has a storage roll (66).
 103. The apparatusaccording to one of claims 86 to 102, characterized in that the coatingstations (42, 44) and the ion-bombardment station (43) have carrierrollers (45, 46, 47) over the roll peripheries of which the carrier foil(61) is guided.
 104. A method of producing a marking device in which ona surface of a carrier, a coding coating has at least one magnetic baselayer and at least one magnetic coding layer as well as a nonmagneticintermediate layer between them, is provided and which has such acharacteristic that regions of nonparallel or antiparallel coupling areprovided, characterized in that the intermediate layer is galvanicallyapplied and the application is controlled with respect to place andthickness by a nonhomogeneous electric field.
 105. The method accordingto claim 104, characterized in that in the galvanic application of theintermediate layer the surface to receive the layer has regions ofpositive electric charge and/or regions of negative electric chargeproduced thereon.
 106. The method of producing a marking device inwhich, on the surface of a carrier, a coding coating is applied with atleast one magnetic base layer, at least one magnetic coding layer and anonmagnetic intermediate layer between them, and which has acharacteristic such that regions of nonparallel or antiparallel couplingare produced, characterized in that the coding coating after it isproduced is locally heated to such a temperature that there the magneticcoupling is altered.
 107. The method according to claim 106,characterized in that in the coding coating is locally heated to such atemperature that there a nonparallel or antiparallel coupling isconverted into a parallel coupling.
 108. The method according to claim106 or 107, characterized in that in the production of the codingcoating a uniformly thick intermediate layer is produced which effects anonparallel or antiparallel coupling.
 109. The method according to oneof claims 106 to 108, characterized in that in the base layer, theintermediate layer and the coding layer are vapor deposited.
 110. Themethod according to one of claims 106 to 109, characterized in that theapplication of the base layer and of the coating layer are effectedunder the influence of a magnetic field.
 111. The method according toone of claims 106 to 110, characterized in that with the intermediatelayer, a protective layer is applied especially by vapor deposition.112. The apparatus for carrying out the method according to one ofclaims 106 to 111, characterized by: a) a supply store for a carrierfoil; b) a heating station for locally heating the coding coating; c) atake-up store for receiving the marking device; d) guide elements and adrive for feeding the carrier foil from the supply store through theheating station to the take-up store.
 113. The apparatus according toclaim 112, characterized by: a) a first coating station for applying abase layer of magnetizable material to the carrier foil; b) a secondcoating station for applying an intermediate layer of nonmagnetizablematerial to the base layer; c) a third coating station for applying acoding layer of magnetizable material on the intermediate layer; d)guide elements and a drive for feeding the carrier foil from the supplystore through the coating station and through the heating station to thetake-up store.
 114. The apparatus according to claim 112 or 113,characterized in that the heating station has a laser.
 115. Theapparatus claim 113 or 114, characterized in that a further coatingstation is provided for applying a protective layer on the coding layer.116. The apparatus according to one of claims 113 to 115, characterizedin that the coating stations have vapor-deposition devices.
 117. Theapparatus according to one of claims 112 to 116, characterized in thatthe supply store is formed as a supply roll and the take-up store has astorage roll.
 118. The apparatus according to one of claims 113 to 117,characterized in that the coating stations and the heating station havecarrier rolls over whose roll peripheries the carrier foil is guided.119. The method of making a marking device in which a coding coating isprovided on the surface of a carrier and has at least one magnetic baselayer, at least one magnetic coding layer and a nonmagnetic intermediatelayer arranged between the two and which has such characteristics thatregions of nonparallel or antiparallel coupling are produced,characterized in that the coding coating after its production is locallysubjected to ion bombardment and that there the magnetic coupling isaltered.
 120. The method according to claim 119, characterized in thatthe coding coating after production is locally treated with ionbombardment so that there a nonparallel or antiparallel coupling istransformed into a parallel coupling.
 121. The method according to claim119 or 120, characterized in that in the production a uniform thicknessintermediate layer is produced which forms a nonparallel or antiparallelcoupling.
 122. The method according to one of claims 119 to 121,characterized in that the ion bombardment is effected with the aid of afocused ion beam.
 123. The method according to one of claims 119 to 121,characterized in that the ion bombardment is effected over an area andin the region of the carrier a nonhomogeneous electric charge field isproduced.
 124. The method according to claim 123, characterized in thatan electrically-chargeable carrier prior to the ion bombardment isnonhomogeneously electrically charged.
 125. The method according toclaim 123, characterized in that an electrically-chargeable substrate ischarged nonhomogenously electrically and that the carrier is placed uponthis substrate and the ion bombardment is effected on the combination ofthe substrate and the carrier.
 126. The method according to claim 125,characterized in that a carrier foil is drawn from a first supply andafter the coating is brought together with a continuously moved chargingfoil has an underlay and both are subjected to ion bombardment.
 127. Themethod according to claim 126, characterized in that the carrier foiland the charging foil are separated after the ion bombardment.
 128. Themethod according to claim 126 or 127, characterized in that the chargingfoil is withdrawn from a supply and is then charged and after the ionbombardment is taken up in a store.
 129. The method according to claim126 or 127, characterized in that a charging foil is displaced as asubstrate in a circulating path through an ion bombardment station andthe charging foil is charged upstream of the ion-bombardment station anddownstream of the ion-bombardment station is discharged or has itselectric charge homogenized.
 130. The method according to claim 119 to121, characterized in that a carrier foil and a masking foil arecontinuously withdrawn from respective supplies and brought together andthat then the ion bombardment is effected from the sides of the maskingfoil and the masking foil is again separated from the carrier foil. 131.The apparatus [sic] according to claim 130, characterized in that themasking foil after being withdrawn from the supply and before beingbrought together with the carrier foil is provided with openings. 132.The method according to one of claims 119 to 131, characterized in thatthe base layer, the intermediate layer and the coding layer are vapordeposited.
 133. The method according to one of claims 119 to 132,characterized in that the application of the base layer and of thecoding layer are effected under the influence of a magnetic field. 134.The method according to one of claims 119 to 133, characterized in thata protective layer is applied to the intermediate layer, especially byvapor deposition.
 135. The apparatus for carrying out the methodaccording to one of claims 119 to 134, characterized by: a) a supplystore for a carrier foil; b) an ion bombardment station for the ion beamapplication of the ion beam impingement of the coding coating; c) atake-up store for the marking device; d) guide elements and a drive forfeeding the carrier foil from the supply store through theion-bombardment station to the take-up store.
 136. The apparatus forcarrying out the method according to claim 135, characterized by: a) afirst coating station for applying a base layer of magnetizable materialto the carrier foil; b) a second coating station for applying anintermediate layer of nonmagnetizable material to the base layer; c) athird coating station for applying a coding layer of magnetizablematerial to the intermediate layer; d) a guide device and a drive forfeeding the carrier foil from the supply store through the coatingstation and the ion-bombardment station to the take-up store.
 137. Theapparatus according to claim 135 or 136, characterized in that theion-bombardment station generates a focused ion beam and a control unitfor the targeted control of the ion beam.
 138. The apparatus accordingto one of claims 135 to 137, characterized in that anelectrically-chargeable carrier foil is guided through theion-bombardment station and is provided with a nonhomogeneous electriccharge in a charging device.
 139. The apparatus according to one ofclaims 135 or 137, characterized in that an electrically-chargeablecarrier foil is guided through the ion-bombardment station and has anonhomogeneous electric charge and that the guide device effects ajoining of the carrier foil and charging foil upstream of theion-bombardment station.
 140. The apparatus according to claim 139,characterized in that a supply store for the charging foil is providedupstream of the ion-bombardment station and a take-up store is provideddownstream of the ion-bombardment station and a charging device isprovided for nonhomogeneously charging the charging foil between thesupply store and the ion-bombardment station.
 141. The apparatusaccording to claim 139, characterized in that the charging foil isconfigured as an endless foil and is guided via the guide devicetogether with the carrier foil through the ion-bombardment stations andthat the charging device is provided upstream of the ion-bombardmentstation in the travel direction of the carrier foil and a quenchingdevice is provided between the ion-bombardment station and the chargingdevice for discharging or homogenizing the electric charge.
 142. Theapparatus according to claim 141, characterized in that the chargingfoil is stretched on a support roll which is juxtaposed with theion-bombardment station.
 143. The apparatus according to one of claims135 to 136, characterized in that the ion-bombardment station isjuxtaposed with a support roll over whose roll peripherally the carrierfoil is guided past the ion-bombardment stations and that the rollperiphery is electrically-chargeable whereby the charging device isprovided for applying a patterned electric charge which is the same asthe charge of an ion beam, and a quenching device for homogenizing theelectric charge or for discharging it.
 144. The apparatus according toclaim 143, characterized in that the quenching device and writing deviceare arranged after one another in the direction of rotation of thesupport roll in the region of the roll periphery which is free from thecarrier foil.
 145. The apparatus according to claim 143 or 144,characterized in that the roll periphery has a coating which ischargeable with an electric charge.
 146. The apparatus according to oneof claims 135 to 137, characterized in that the ion-bombardment stationhas a masking foil passed therethrough and the guide device effects ajoining of the carrier foil and masking foil upstream of theion-bombardment station in such manner that the ion bombardment iseffected from the side of the masking foil and that the guide deviceseparates the carrier foil and the masking foil downstream of theion-bombardment station.
 147. The apparatus according to claim 146,characterized in that between a supply store for the masking foil andthe joining of the masking foil and the carrier foil a mask-formingstation is arranged to produce openings in the masking foil.
 148. Theapparatus according to claim 147, characterized in that the mask-formingstation has a laser-burning device.
 149. The apparatus according toclaim 148, characterized in that the mask-forming station has a controldevice for varying the position of the laser-burning device.
 150. Theapparatus according to one of the claims 135 to 149, characterized inthat a further coating station is provided for applying a protectivelayer to the coding layer.
 151. The apparatus according to one of theclaims 135 to 150, characterized in that the coating stations havevapor-deposition devices.
 152. The apparatus according to one of theclaims 135 to 151, characterized in that the supply store is configuredas a supply roll and the take-up store has a storage roll.
 153. Theapparatus according to one of the claims 135 to 152, characterized inthat the coating stations and the ion-bombardment station have carrierrolls over whose roll peripheries the carrier foil is guided.